| title: | Effect of Surface and Transition Layers on Atomic Layer Growth and Properties of Oxide Thin Films with Wide Energy Gap |
|---|---|
| reg no: | ETF5861 |
| project type: | Estonian Science Foundation research grant |
| subject: |
1.3. Physics 2.2. Materials Science |
| status: | accepted |
| institution: | TU Faculty of Physics and Chemistry |
| head of project: | Arnold Rosental |
| duration: | 01.01.2004 - 31.12.2007 |
| description: | The aim of this project is to explore generation mechanisms of transition layers and the role of the transition and surface layers in the components of (micro)electronic devices, which are based on ultrathin oxide films. This kind of transition and/or surface layers, which are frequently formed in an uncontrolled way, may have a crucial influence on perfomance of the devices. This problem is known but the solution of that is complex and requires systematical fundamental studies. The latter aspect in view, a detailed investigation of atomic layer growth and characterization of physical properties of metal oxides (HfO2, ZrO2, TiO2, SnO2, etc.) needed for the development of electronic devices will be carried out. As a result, new technological solutions will be proposed for preparing in a reproducible manner of (i) stable high-permittivity dielectric layers applicable in next-generation ULSI DRAM capacitors and MOSFETs and (ii) gas sensitive semiconductor layers allowing the improvement of the quality of semiconductor gas sensors sensitive to oxidizing and reducing gases. Close attention will be paid to the mechanisms of epitaxial growth of the films made of these oxides, properties of the epitaxial films grown, and possibilities of their application for given purposes. It is anticipated to throw more light on the dynamics of the growth and to obtain new data on the dependence of optical and electrical properties of the films to their structure. |
| project group | ||||
|---|---|---|---|---|
| no | name | institution | position | |
| 1. | Jaan Aarik | University of Tartu | teadur | |
| 2. | Aleks Aidla | University of Tartu | insener | |
| 3. | Aarne Kasikov | University of Tartu | juhataja | |
| 4. | Kaupo Kukli | University of Tartu | vanemteadur | |
| 5. | Ahti Niilisk | University of Tartu | vanemteadur | |
| 6. | Arnold Rosental | TU Faculty of Physics and Chemistry | senior Researcher | |
| 7. | Hele Siimon | TÜ MTI | lektor | |
| 8. | Aivar Tarre | University of Tartu | teadur | |
| 9. | Teet Uustare | University of Tartu | vanemteadur | |